After looking, it seems I can simply replace the part I damaged (F80110114). See http://www.jimellismazdaparts.com/pr...F80110114.html
But I'm still interested in any answers to my original question. Since I have the cam box off, it would be easier to replace the cams now (but perhaps not better if I'm replacing them with cams intended for FI).
I also damaged the intake cam gear. Definitely want to replace it. Should I get adjustable cam gears?